Einführung in die Mikrosystemtechnik - Ein Kursbuch für Studierende

von: Gerald Gerlach, Wolfram Dötzel

Carl Hanser Fachbuchverlag, 2006

ISBN: 9783446405233

Sprache: Deutsch

386 Seiten, Download: 17587 KB

Format: PDF, auch als Online-Lesen

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Einführung in die Mikrosystemtechnik - Ein Kursbuch für Studierende

	Vorwort	6
	Inhaltsverzeichnis	8
	1 Einführung	14
	1.1 Was ist ein Mikrosystem?	17
	1.2 Mikroelektronik und Mikrosystemtechnik	21
	1.3 Anwendungsfelder und Entwicklungstrends	23
	1.4 Beispiel Drehratensensor	24
	2 Skalierung und Ähnlichkeit	32
	Skalierung	32
	Ähnlichkeit und Kennzahlen	38
	3 Werkstoffe	44
	Übersicht	44
	Einkristallines Silizium	48
	Beschreibung der Orientierung von Flächen und Ri	49
	Oberflächeneigenschaften bei verschiedener Orien	56
	Anisotrope elastische Eigenschaften	57
	Festigkeit	60
	Siliziumscheiben	64
	Gläser	68
	Allgemeine Eigenschaften von Glas	69
	Viskoelastisches Verhalten	70
	Gläser in der Mikrosystemtechnik	72
	Polymere	74
	Thermoplastische Werkstoffe in der Mikrosystemtechnik	75
	Allgemeine Eigenschaften	75
	Mechanische Eigenschaften	76
	Thermoplastische Polymere	76
	Fotoresist	78
	Negativresiste	79
	Positivresiste	79
	Dünnschichten	80
	Siliziumoxid, Siliziumnitrid	83
	Elektrisch leitende Schichten	85
	Polysiliziumschichten	85
	Materialeigenschaften im Vergleich	86
	4 Mikrotechnische Fertigungsverfahren	89
	Überblick	89
	Reinheit in der Fertigung	95
	Reinraumtechnik	96
	Ausbeute	97
	Reinraum	98
	Waferreinigung	100
	Lithografie	102
	Prinzip	102
	Lithografischer Prozess	103
	Minimal strukturierbare Linienbreiten	106
	Doppelseitenlithografie	107
	Lithografie in stark profilierten Strukturen	107
	Schichtherstellung	108
	Überblick	108
	Schichtkonformität	110
	Thermische Oxidation	110
	Aufdampfen	112
	Sputtern	114
	Chemische Gasphasenabscheidung	116
	Vergleich	118
	Schichtstrukturierung	119
	Grundlagen	119
	Nassätzen	121
	Trockenätzen	121
	Lift-off-Prozess	124
	Anisotropes nasschemisches Tiefenätzen	124
	Prinzip	125
	Anisotrope Ätzlösungen	126
	Ätzraten	127
	Ätzstoppverfahren	130
	Ätzfiguren	132
	Ätzratendiagramme	132
	Herausbildung von Ätzfiguren	134
	Unterätzung konvexer Ecken	140
	Entwurf von Ätzmasken	141
	Dotierung	143
	Diffusion	143
	Diffusionsgesetz	144
	Dotierquellen	145
	Diffusionsprofil	145
	Thermisches Budget	146
	Ionenimplantation	147
	Dotierungsprofil	147
	Strahlenschäden und Ausheilung	149
	Anwendung	149
	Vergleich der Dotierungsverfahren	149
	Verbindungsverfahren	150
	Eutektisches Bonden	151
	Anodisches Bonden	152
	Siliziumdirektbonden	153
	Vergleich der Verbindungsverfahren	153
	Isolationstechniken	154
	SIMOX-Verfahren	155
	BESOI-Verfahren	156
	Smart-Cut-Verfahren	158
	Oberflächenmikromechanik	159
	Prinzip	159
	Herstellung von Hohlräumen	162
	Haften beweglicher Strukturen	165
	Haftung durch Flüssigkeitsfilme	165
	Vermeidung von haftenden Strukturen	166
	Vergleich von Volumen- und Oberflächenmikromecha	168
	Oberflächennahe Mikromechanik	168
	Prinzip	169
	Verfahren	169
	a)SCREAM-Prozess	169
	b)SIMPLE-Prozess	171
	HARMST	172
	Begriffsbestimmung	172
	LIGA-Verfahren	172
	Miniaturisierte klassische Verfahren	174
	Mikrospritzgießen	176
	Mikroheißprägen	179
	Mikrozerspanen	180
	Auswahl von mikrotechnischen Fertigungsverfahren	183
	BookmarkLevel: 3BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: a)Grundformen und Synthese der GesamtgestaltBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: b)FormbegrenzungBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: c)Auswahl der VerfahrensschritteBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: 5 Aufbau- und VerbindungstechnikBookmarkLevel: 1BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Aufgaben und AnforderungenBookmarkLevel: 2BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: AufgabenBookmarkLevel: 3BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Zuverlässigkeitsgerechtes PackagingBookmarkLevel: 3BookmarkPageNumber: 195BookmarkBeginBookmarkTitle: Funktionen der Aufbau- und VerbindungstechnikBookmarkLevel: 2BookmarkPageNumber: 196BookmarkBeginBookmarkTitle: Mechanische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: SubstratwerkstoffeBookmarkLevel: 4BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: Monolithische versus HybridintegrationBookmarkLevel: 4BookmarkPageNumber: 198BookmarkBeginBookmarkTitle: Thermische AnpassungBookmarkLevel: 4BookmarkPageNumber: 200BookmarkBeginBookmarkTitle: Elektrische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 201BookmarkBeginBookmarkTitle: WärmeabführungBookmarkLevel: 3BookmarkPageNumber: 202BookmarkBeginBookmarkTitle: Verkapselung und GehäusungBookmarkLevel: 3BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: a)BeschichtungenBookmarkLevel: 4BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: b)TrennmembranenBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: c)VerkapselungBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: d)Hermetische AbdichtungBookmarkLevel: 4BookmarkPageNumber: 205BookmarkBeginBookmarkTitle: 6 Funktions- und Formelemente der MikrosystemtechnikBookmarkLevel: 1BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Mechanische ElementeBookmarkLevel: 2BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Empfindlichkeit in NutzrichtungBookmarkLevel: 3BookmarkPageNumber: 213BookmarkBeginBookmarkTitle: QuerempfindlichkeitBookmarkLevel: 3BookmarkPageNumber: 216BookmarkBeginBookmarkTitle: EigenfrequenzBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: DämpfungBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: GüteBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: AmplitudengangBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: Spannung an der EinspannstelleBookmarkLevel: 3BookmarkPageNumber: 220BookmarkBeginBookmarkTitle: Fluidische ElementeBookmarkLevel: 2BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: Kennzahlen und ModellsystemeBookmarkLevel: 3BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: ElementtypenBookmarkLevel: 3BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: Fluidischer WiderstandBookmarkLevel: 4BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: b\)Fluidische KapazitätBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: c\)Fluidische TrägheitBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: Fluidische SchnittstellenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: Entwurf mikrofluidischer Elemente und KomponentenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: a)Entwurf mikrofluidischer ElementeBookmarkLevel: 4BookmarkPageNumber: 233BookmarkBeginBookmarkTitle: b)Entwurf mikrofluidischer KomponentenBookmarkLevel: 4BookmarkPageNumber: 235BookmarkBeginBookmarkTitle: Thermische ElementeBookmarkLevel: 2BookmarkPageNumber: 237BookmarkBeginBookmarkTitle: Thermisch-elektrische AnalogienBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: Grundgleichungen für den WärmetransportBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: ErsatzschaltungenBookmarkLevel: 3BookmarkPageNumber: 243BookmarkBeginBookmarkTitle: 7 Sensoren und AktorenBookmarkLevel: 1BookmarkPageNumber: 251BookmarkBeginBookmarkTitle: Umkehrbare und parametrische WandlerBookmarkLevel: 2BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Parametrische WandlerBookmarkLevel: 3BookmarkPageNumber: 259BookmarkBeginBookmarkTitle: Stationäre umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 261BookmarkBeginBookmarkTitle: Wandler für Sensoren und AktorenBookmarkLevel: 2BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Elektrostatische WandlerBookmarkLevel: 3BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Piezoelektrische WandlerBookmarkLevel: 3BookmarkPageNumber: 270BookmarkBeginBookmarkTitle: Elektrodynamische WandlerBookmarkLevel: 3BookmarkPageNumber: 273BookmarkBeginBookmarkTitle: Thermomechanische WandlerBookmarkLevel: 3BookmarkPageNumber: 279BookmarkBeginBookmarkTitle: a\)Thermische Ausdehnung von FestkörpernBookmarkLevel: 4BookmarkPageNumber: 280BookmarkBeginBookmarkTitle: b)Thermische Ausdehnung von BimaterialienBookmarkLevel: 4BookmarkPageNumber: 282BookmarkBeginBookmarkTitle: c\)Thermische Ausdehnung von Gasen und FlüssigkBookmarkLevel: 4BookmarkPageNumber: 285BookmarkBeginBookmarkTitle: Piezoresistive WandlerBookmarkLevel: 3BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: a)Piezoresistiver EffektBookmarkLevel: 4BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: b)Piezoresistive SensorenBookmarkLevel: 4BookmarkPageNumber: 292BookmarkBeginBookmarkTitle: 8 Entwurf von MikrosystemenBookmarkLevel: 1BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Entwurfsmethoden und WerkzeugeBookmarkLevel: 2BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Systeme mit konzentrierten ParameternBookmarkLevel: 2BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Verhaltensbeschreibung elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Analyse des statischen Verhaltens elektromechaniBookmarkLevel: 3BookmarkPageNumber: 315BookmarkBeginBookmarkTitle: Analyse elektromechanischer Systeme bei harmonischen LastenBookmarkLevel: 3BookmarkPageNumber: 318BookmarkBeginBookmarkTitle: Transiente Analyse elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 322BookmarkBeginBookmarkTitle: Systeme mit verteilten ParameternBookmarkLevel: 2BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Verhaltensbeschreibung mittels analytischer ModelleBookmarkLevel: 3BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Numerische Methoden auf der Basis der Finiten-Elemente-MethodeBookmarkLevel: 3BookmarkPageNumber: 328BookmarkBeginBookmarkTitle: Makromodellierung komplexer Systeme durch OrdnungsreduktionBookmarkLevel: 3BookmarkPageNumber: 330BookmarkBeginBookmarkTitle: 9 Einfluss technologischer Prozesse auf MikrosystemeigenschaftenBookmarkLevel: 1BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Parameterbasierter MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Robuster MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 343BookmarkBeginBookmarkTitle: AnhangBookmarkLevel: 1BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang A Physikalische KonstantenBookmarkLevel: 2BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang B KoordinatentransformationBookmarkLevel: 2BookmarkPageNumber: 353BookmarkBeginBookmarkTitle: B.1 Elastische KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 354BookmarkBeginBookmarkTitle: B.2 Piezoresistive KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 357BookmarkBeginBookmarkTitle: Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-SchichtenBookmarkLevel: 2BookmarkPageNumber: 360BookmarkBeginBookmarkTitle: Anhang D Nomenklatur von DünnschichtprozessenBookmarkLevel: 2BookmarkPageNumber: 362BookmarkBeginBookmarkTitle: Anhang E Haftung bei oberflächen-mikromechaniscBookmarkLevel: 2BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.1 KapillarkräfteBookmarkLevel: 3BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.2 Kritische Länge von BiegefedernBookmarkLevel: 3BookmarkPageNumber: 366BookmarkBeginBookmarkTitle: SymbolverzeichnisBookmarkLevel: 1BookmarkPageNumber: 368BookmarkBeginBookmarkTitle: AbkürzungsverzeichnisBookmarkLevel: 1BookmarkPageNumber: 376BookmarkBeginBookmarkTitle: StichwortverzeichnisBookmarkLevel: 1BookmarkPageNumber: 381BookmarkBeginBookmarkTitle: Mehr eBooks bei www.ciando.comBookmarkLevel: 1BookmarkPageNumber: 0PageMediaBeginPageMediaNumber: 1PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaBeginPageMediaNumber: 2PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 3PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 4PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 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754.126PageLabelBeginPageLabelNewIndex: 1PageLabelStart: 1PageLabelNumStyle: NoNumberPageLabelBeginPageLabelNewIndex: 2PageLabelStart: 1PageLabelNumStyle: DecimalArabicNumeralsTitle: 3446405232Subject:Keywords:Author: installCreator: PDFCreator Professional 4.2.0Producer: GPL Ghostscript 9.52CreationDate: Wed May 5 17:03:43 2021 CESTModDate: Wed May 5 17:03:43 2021 CESTTagged: noUserProperties: noSuspects: noForm: noneJavaScript: noPages: 386Encrypted: noPage size: 595 x 842 pts (A4)Page rot: 0File size: 12306878 bytesOptimized: noPDF version: 1.4	185
	a)Grundformen und Synthese der Gesamtgestalt	185
	b)Formbegrenzung	185
	c)Auswahl der Verfahrensschritte	185
	5 Aufbau- und Verbindungstechnik	191
	Aufgaben und Anforderungen	191
	Aufgaben	191
	Zuverlässigkeitsgerechtes Packaging	195
	Funktionen der Aufbau- und Verbindungstechnik	196
	Mechanische Verbindungen	197
	Substratwerkstoffe	197
	Monolithische versus Hybridintegration	198
	Thermische Anpassung	200
	Elektrische Verbindungen	201
	Wärmeabführung	202
	Verkapselung und Gehäusung	203
	a)Beschichtungen	203
	b)Trennmembranen	204
	c)Verkapselung	204
	d)Hermetische Abdichtung	205
	6 Funktions- und Formelemente der Mikrosystemtechnik	210
	Mechanische Elemente	210
	Empfindlichkeit in Nutzrichtung	213
	Querempfindlichkeit	216
	Eigenfrequenz	217
	Dämpfung	217
	Güte	219
	Amplitudengang	219
	Spannung an der Einspannstelle	220
	Fluidische Elemente	225
	Kennzahlen und Modellsysteme	225
	Elementtypen	229
	Fluidischer Widerstand	229
	b\)Fluidische Kapazität	231
	c\)Fluidische Trägheit	231
	Fluidische Schnittstellen	232
	Entwurf mikrofluidischer Elemente und Komponenten	232
	a)Entwurf mikrofluidischer Elemente	233
	b)Entwurf mikrofluidischer Komponenten	235
	Thermische Elemente	237
	Thermisch-elektrische Analogien	238
	Grundgleichungen für den Wärmetransport	238
	Ersatzschaltungen	243
	7 Sensoren und Aktoren	251
	Umkehrbare und parametrische Wandler	252
	Umkehrbare Wandler	252
	Parametrische Wandler	259
	Stationäre umkehrbare Wandler	261
	Wandler für Sensoren und Aktoren	264
	Elektrostatische Wandler	264
	Piezoelektrische Wandler	270
	Elektrodynamische Wandler	273
	Thermomechanische Wandler	279
	a\)Thermische Ausdehnung von Festkörpern	280
	b)Thermische Ausdehnung von Bimaterialien	282
	c\)Thermische Ausdehnung von Gasen und Flüssigk	285
	Piezoresistive Wandler	287
	a)Piezoresistiver Effekt	287
	b)Piezoresistive Sensoren	292
	8 Entwurf von Mikrosystemen	307
	Entwurfsmethoden und Werkzeuge	307
	Systeme mit konzentrierten Parametern	314
	Verhaltensbeschreibung elektromechanischer Systeme	314
	Analyse des statischen Verhaltens elektromechani	315
	Analyse elektromechanischer Systeme bei harmonischen Lasten	318
	Transiente Analyse elektromechanischer Systeme	322
	Systeme mit verteilten Parametern	325
	Verhaltensbeschreibung mittels analytischer Modelle	325
	Numerische Methoden auf der Basis der Finiten-Elemente-Methode	328
	Makromodellierung komplexer Systeme durch Ordnungsreduktion	330
	9 Einfluss technologischer Prozesse auf Mikrosystemeigenschaften	339
	Parameterbasierter Mikrosystementwurf	339
	Robuster Mikrosystementwurf	343
	Anhang	352
	Anhang A Physikalische Konstanten	352
	Anhang B Koordinatentransformation	353
	B.1 Elastische Koeffizienten	354
	B.2 Piezoresistive Koeffizienten	357
	Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-Schichten	360
	Anhang D Nomenklatur von Dünnschichtprozessen	362
	Anhang E Haftung bei oberflächen-mikromechanisc	365
	E.1 Kapillarkräfte	365
	E.2 Kritische Länge von Biegefedern	366
	Symbolverzeichnis	368
	Abkürzungsverzeichnis	376
	Stichwortverzeichnis	381
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Einführung in die Mikrosystemtechnik - Ein Kursbuch für Studierende

von: Gerald Gerlach, Wolfram Dötzel

Einführung in die Mikrosystemtechnik - Ein Kursbuch für Studierende

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